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CETC ELECTRONICS EQUIPMENT GROUP CO., LTD.     京ICP备15059159号     京公网安备11010602005565号 | Powered by www.300.cn

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Stepper

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Details
Parameters
Characteristics

Resolution:0.35um um L&S (At best Focus)

Overlay Accuracy LSA-EGA:|X|  + 3σ≤0.07um

Lens Distortion:≤45nm(x,y)

Maximum Exposure Area:22mm x 22mm  

Stepping Precision:3σ≤0.05um

Corresponding parameter set not found, please add it in property template of background
暂未实现,敬请期待
暂未实现,敬请期待
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